Deep Learning for Semiconductor Materials and Devices Design
Published in IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 2023
This paper provides two examples of use cases of deep learning (DL) in the fabrication and design of modern semiconductor devices: modeling of plasma dry-etching process and transistor performance. The use cases demonstrate an improved version of DL model in terms of model accuracy and prediction time by incorporating scientific knowledge into DL.
Changwook Jeong, …, In Huh, …, et al., IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 2023